Obtaining flattening maps of DMs from the SPEED bench (Kilo-C DMs from Boston Micromachines) for different average voltages. The maps are obtained using a ZYGO Verifire interferometer installed on the SPEED bench. From left to right: no voltage applied, 60 Volts and 150 Volts (averaged voltage). The surface quality obtained, evaluated on the active surface of the DM, varies depending on the case between 10 and 30 nm rms.
